Cut and paste this URL to share the unmodified register and value:
https://regviz.com/r/Silicon Labs/Series1/EFM32GG12B/EFM32GG12B510F1024GM64/ETM/ETMSR#0x0
ETM Status Register
ETM Overflow
ETM Programming Bit Status
Trace Start/Stop Status
Trigger Bit
https://github.com/cmsis-svd/cmsis-svd-data